A panoramic view of a calm marsh at sunset, with golden light reflecting off the water's surface. Tall, dry grasses line the foreground, while a silhouette of trees stands against the glowing horizon under a cloudy sky.

Seminar: Dr. Yaw Obeng, NIST

Dec 06, 2017 at 3:00 PM to Dec 06, 2017 at 4:00 PM

Title: Applications of Broadband Dielectric Spectroscopy to Stress Induced Material Evolution in3_D Integrated Systems

Speaker: Dr. Yaw Obeng, NIST

Abstract: The Broadband Dielectric Spectroscopy (BDS) leverages the interaction of electromagnetic radiation with matter to induce molecular rotations (instead of vibronic transitions in UV-Visible-IR spectroscopy) in solid state materials. BDS measurements provide both electrical and chemical information to guide the reliable integration of material into more solid designs for the intended applications, and for monitoring the manufacturing process. These RF-dielectric material interactions are reasonably granular and uniquely suitable for studying the buried structures and material interfaces inherent in integrated circuit devices. We have demonstrated the application of broadband radio frequency dielectric spectroscopy (BDS) in addressing the metrology gaps in the material evolution during semiconductor device aging. We have also uses the same techniques to characterize bio-based systems, such as high value paper products.

In this talk I will review several BDS applications in determining the dominant failure mechanisms in emerging 3D integrated electronic devices, and propose potential application of BDS in biological systems.